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Jun 25, 2025

Diffusion Plates in Clean Rooms

Diffusion plates in clean rooms have the following important uses:

1. In terms of uniform gas supply

1.1 Achieve uniform air distribution

The expansion plate can disperse the concentrated air flow from the air supply outlet into a uniform laminar flow or turbulent flow. In a clean room, it is necessary to have an even supply of air in order to ensure the proper supply of clean air to the entire work area. For example, in the clean room of integrated circuit manufacturing, high-precision chip manufacturing equipment requires extremely high airflow uniformity. The diffusion plate can decompose the high-speed concentrated air flow emitted by the air conditioning system into many small low-speed air flows, so that it is evenly distributed in the vertical and horizontal directions, ensuring that the equipment and operators are effectively covered by the surrounding clean air.

It can effectively eliminate the "dead Angle" of the gas supply. Without a diffuser plate, the air flow directly from the outlet may be concentrated in certain areas, making it difficult to get enough fresh air in corners or behind equipment away from the outlet. The diffusion plate guides the air flow in all directions through a reasonable structural design, such as a porous or shuttered structure, to ensure that every corner of the clean room has good ventilation conditions.

1.2 Control the gas supply speed and direction

The diffusion plate can adjust the air supply speed. Different areas of the clean room may require different gas supply rates to meet process requirements. For example, in the drug packaging area, in order to prevent the drug from being damaged by excessive airflow, the diffusion plate can reduce the gas supply speed to an appropriate range. At the same time, it can also control the direction of the air supply, according to the layout of the clean room and the placement of the process equipment to direct the air flow to the desired location. For example, in the clean room of a biology laboratory, the diffusion plate above the experimental platform can direct the air flow vertically downwards to avoid lateral interference of the air flow on the experimental sample.

Diffusion PlateDiffusion Plates

2. Keep the environment clean

2.1 Reduce eddy currents and dust

When the centralized gas supply enters the clean room directly, it is easy to produce eddy current. Eddy currents can cause dust and other contaminants to circulate in localized areas, making it difficult to effectively remove them from the clean room. The diffusion plate can reduce the generation of vortices by evenly dispersing the air flow. In clean rooms where electronic components are produced, even tiny dust particles can cause product quality problems. The diffusion plate allows the airflow to spread smoothly, reducing the risk of dust rise and product contamination caused by eddy currents.

For some clean room areas with personnel activities, such as a clean operating room in a hospital, the diffusion plate can prevent dust from flying caused by personnel walking. The uniform and gentle airflow it provides can quickly remove dust from areas such as the ground, rather than allowing dust to circulate indoors, thus maintaining high air quality in the clean room.

2.2 Keep clean room pressure stable

The synergistic effect of the diffusion plate and clean room return air system helps maintain a stable indoor pressure. In the advanced biological clean room, in order to prevent the invasion of external polluted air, it is necessary to maintain indoor positive pressure. The diffusion plate can ensure a stable air supply, so that the pressure of the clean room is kept within the design requirements. If the supply air volume is unstable, the indoor pressure will fluctuate, which may cause the external impure air to enter the clean room through the gap, affecting the cleanliness.

Suzhou Pharma Machinery Co.,Ltd.

2025/06/25

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